# Evaluation of EUV resist performance using interference lithography

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 15× · AI/ML

**Wikidata**: [openalex:W2004045510](https://www.wikidata.org/wiki/openalex:W2004045510)  
**Source**: https://4ort.xyz/entity/evaluation-of-euv-resist-performance-using-interference-lithography