# EUV mask and wafer defectivity: strategy and evaluation for full die defect inspection

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 11× · AI/ML

**Wikidata**: [openalex:W2333627698](https://www.wikidata.org/wiki/openalex:W2333627698)  
**Source**: https://4ort.xyz/entity/euv-mask-and-wafer-defectivity-strategy-and-evaluation-for-full-die-defect-inspection