# EUV lithography: past, present and future

> Research article (Extreme Ultraviolet (EUV) Lithography XII, 2021) · cited 13× · AI/ML

**Wikidata**: [openalex:W3131179059](https://www.wikidata.org/wiki/openalex:W3131179059)  
**Source**: https://4ort.xyz/entity/euv-lithography-past-present-and-future