# EUV high-NA scanner and mask optimization for sub-8nm resolution

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 12× · AI/ML

**Wikidata**: [openalex:W3214411656](https://www.wikidata.org/wiki/openalex:W3214411656)  
**Source**: https://4ort.xyz/entity/euv-high-na-scanner-and-mask-optimization-for-sub-8nm-resolution