# EUV for HVM: towards an industrialized scanner for HVM NXE3400B performance update

> Research article (Extreme Ultraviolet (EUV) Lithography IX, 2018) · cited 44× · AI/ML

**Wikidata**: [openalex:W2792402902](https://www.wikidata.org/wiki/openalex:W2792402902)  
**Source**: https://4ort.xyz/entity/euv-for-hvm-towards-an-industrialized-scanner-for-hvm-nxe3400b-performance-update