# Etch proximity correction through machine-learning-driven etch bias model

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 17× · AI/ML

**Wikidata**: [openalex:W2309891466](https://www.wikidata.org/wiki/openalex:W2309891466)  
**Source**: https://4ort.xyz/entity/etch-proximity-correction-through-machine-learning-driven-etch-bias-model