# Equipment Condition Diagnosis and Fault Fingerprint Extraction in Semiconductor Manufacturing

> Research article (2016 15th IEEE International Conference on Machine Learning and Applications (ICMLA), 2016) · cited 17× · AI/ML

**Wikidata**: [openalex:W2583645756](https://www.wikidata.org/wiki/openalex:W2583645756)  
**Source**: https://4ort.xyz/entity/equipment-condition-diagnosis-and-fault-fingerprint-extraction-in-semiconductor-manufacturing