# Equipment Anomaly Detection for Semiconductor Manufacturing by Exploiting Unsupervised Learning from Sensory Data

> Research article (Sensors, 2020) · cited 20× · AI/ML

**Wikidata**: [openalex:W3090617142](https://www.wikidata.org/wiki/openalex:W3090617142)  
**Source**: https://4ort.xyz/entity/equipment-anomaly-detection-for-semiconductor-manufacturing-by-exploiting-unsupervised-learning-from-sensory-data