# Epitaxially-encapsulated quad mass gyroscope with nonlinearity compensation

> Research article (2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016) · cited 26× · AI/ML

**Wikidata**: [openalex:W2289079697](https://www.wikidata.org/wiki/openalex:W2289079697)  
**Source**: https://4ort.xyz/entity/epitaxially-encapsulated-quad-mass-gyroscope-with-nonlinearity-compensation
