# Enhancing accuracy of alignment measurement in lithography using two-dimensional desirable sidelobe convolution window

> Research article (Measurement, 2024) · cited 11× · AI/ML

**Wikidata**: [openalex:W4404214381](https://www.wikidata.org/wiki/openalex:W4404214381)  
**Source**: https://4ort.xyz/entity/enhancing-accuracy-of-alignment-measurement-in-lithography-using-two-dimensional-desirable-sidelobe-convolution-window