# Enhanced Quality of Wafer‐Scale MoS<sub>2</sub> Films by a Capping Layer Annealing Process

> Research article (Advanced Functional Materials, 2020) · cited 32× · AI/ML

**Wikidata**: [openalex:W3001648922](https://www.wikidata.org/wiki/openalex:W3001648922)  
**Source**: https://4ort.xyz/entity/enhanced-quality-of-waferscale-mos-sub-2-sub-films-by-a-capping-layer-annealing-process