# Enabling scanning electron microscope contour-based optical proximity correction models

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2015) · cited 19× · AI/ML

**Wikidata**: [openalex:W1978280934](https://www.wikidata.org/wiki/openalex:W1978280934)  
**Source**: https://4ort.xyz/entity/enabling-scanning-electron-microscope-contour-based-optical-proximity-correction-models