# Embedded passive components in advanced 3D chips and micro/nano electronic systems

> Research article (Microsystem Technologies, 2017) · cited 18× · AI/ML

**Wikidata**: [openalex:W2765818948](https://www.wikidata.org/wiki/openalex:W2765818948)  
**Source**: https://4ort.xyz/entity/embedded-passive-components-in-advanced-3d-chips-and-micro-nano-electronic-systems