# Electrostatic Micro-Electro-Mechanical-Systems (MEMS) Devices: A Comparison Among Numerical Techniques for Recovering the Membrane Profile

> Research article (IEEE Access, 2020) · cited 25× · AI/ML

**Wikidata**: [openalex:W3041910339](https://www.wikidata.org/wiki/openalex:W3041910339)  
**Source**: https://4ort.xyz/entity/electrostatic-micro-electro-mechanical-systems-mems-devices-a-comparison-among-numerical-techniques-for-recovering-the-m
