# electron beam lithography

> lithographic technique that uses a scanning beam of electrons

**Wikidata**: [Q256845](https://www.wikidata.org/wiki/Q256845)  
**Wikipedia**: [English](https://en.wikipedia.org/wiki/Electron-beam_lithography)  
**Source**: https://4ort.xyz/entity/electron-beam-lithography


## References

1. Freebase Data Dumps. 2013
2. [Source](https://golden.com/wiki/Electron-beam_lithography-ZXB3YR)
3. [OpenAlex](https://docs.openalex.org/download-snapshot/snapshot-data-format)