# Electron-Beam-Induced Carbon Contamination in STEM-in-SEM: Quantification and Mitigation

> Research article (Microscopy and Microanalysis, 2022) · cited 52× · AI/ML

**Wikidata**: [openalex:W4317542813](https://www.wikidata.org/wiki/openalex:W4317542813)  
**Source**: https://4ort.xyz/entity/electron-beam-induced-carbon-contamination-in-stem-in-sem-quantification-and-mitigation