# Electrical test prediction using hybrid metrology and machine learning

> Research article (Metrology, Inspection, and Process Control for Microlithography XXXI, 2017) · cited 17× · AI/ML

**Wikidata**: [openalex:W2606900472](https://www.wikidata.org/wiki/openalex:W2606900472)  
**Source**: https://4ort.xyz/entity/electrical-test-prediction-using-hybrid-metrology-and-machine-learning