# Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates

> Research article (Thin Solid Films, 2018) · cited 24× · AI/ML

**Wikidata**: [openalex:W2890170356](https://www.wikidata.org/wiki/openalex:W2890170356)  
**Source**: https://4ort.xyz/entity/electrical-and-structural-characteristics-of-sputtered-c-oriented-aln-thin-films-on-si-100-and-si-110-substrates