# Efficient optical proximity correction based on virtual edge and mask pixelation with two-phase sampling

> Research article (Optics Express, 2021) · cited 22× · AI/ML

**Wikidata**: [openalex:W3162993536](https://www.wikidata.org/wiki/openalex:W3162993536)  
**Source**: https://4ort.xyz/entity/efficient-optical-proximity-correction-based-on-virtual-edge-and-mask-pixelation-with-two-phase-sampling