# Efficient Feature Selection-Based on Random Forward Search for Virtual Metrology Modeling

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2016) · cited 32× · AI/ML

**Wikidata**: [openalex:W2503140580](https://www.wikidata.org/wiki/openalex:W2503140580)  
**Source**: https://4ort.xyz/entity/efficient-feature-selection-based-on-random-forward-search-for-virtual-metrology-modeling