# Effects of wafer noise on the detection of 20-nm defects using optical volumetric inspection

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2015) · cited 15× · AI/ML

**Wikidata**: [openalex:W1969027954](https://www.wikidata.org/wiki/openalex:W1969027954)  
**Source**: https://4ort.xyz/entity/effects-of-wafer-noise-on-the-detection-of-20-nm-defects-using-optical-volumetric-inspection