# Effects of molecular weight and dispersity on performance of main-chain-scission-type resist

> Research article (Japanese Journal of Applied Physics, 2019) · cited 23× · AI/ML

**Wikidata**: [openalex:W2912489328](https://www.wikidata.org/wiki/openalex:W2912489328)  
**Source**: https://4ort.xyz/entity/effects-of-molecular-weight-and-dispersity-on-performance-of-main-chain-scission-type-resist