# Effect of texture on 4H–SiC substrate surface on film growth: A molecular dynamics study

> Research article (Vacuum, 2023) · cited 12× · AI/ML

**Wikidata**: [openalex:W4376269574](https://www.wikidata.org/wiki/openalex:W4376269574)  
**Source**: https://4ort.xyz/entity/effect-of-texture-on-4hsic-substrate-surface-on-film-growth-a-molecular-dynamics-study