# Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach

> Research article (Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, 2016) · cited 23× · AI/ML

**Wikidata**: [openalex:W2336302696](https://www.wikidata.org/wiki/openalex:W2336302696)  
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