# Effect of magnetron sputtering parameters and stress state of W film precursors on WSe2 layer texture by rapid selenization

> Research article (Scientific Reports, 2016) · cited 27× · AI/ML

**Wikidata**: [openalex:W2548675189](https://www.wikidata.org/wiki/openalex:W2548675189)  
**Source**: https://4ort.xyz/entity/effect-of-magnetron-sputtering-parameters-and-stress-state-of-w-film-precursors-on-wse2-layer-texture-by-rapid-selenizat