# Effect of bias on structure mechanical properties and corrosion resistance of TiNx films prepared by ion source assisted magnetron sputtering

> Research article (Thin Solid Films, 2019) · cited 27× · AI/ML

**Wikidata**: [openalex:W2916811160](https://www.wikidata.org/wiki/openalex:W2916811160)  
**Source**: https://4ort.xyz/entity/effect-of-bias-on-structure-mechanical-properties-and-corrosion-resistance-of-tinx-films-prepared-by-ion-source-assisted