# Edge placement error fundamentals and impact of EUV: will traditional design-rule calculations work in the era of EUV?

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2018) · cited 16× · AI/ML

**Wikidata**: [openalex:W2894416514](https://www.wikidata.org/wiki/openalex:W2894416514)  
**Source**: https://4ort.xyz/entity/edge-placement-error-fundamentals-and-impact-of-euv-will-traditional-design-rule-calculations-work-in-the-era-of-euv