# Dynamics-inspired feature extraction in semiconductor manufacturing processes

> Research article (Journal of Industrial Information Integration, 2018) · cited 21× · AI/ML

**Wikidata**: [openalex:W2906110373](https://www.wikidata.org/wiki/openalex:W2906110373)  
**Source**: https://4ort.xyz/entity/dynamics-inspired-feature-extraction-in-semiconductor-manufacturing-processes