# Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control

> Research article (IEEE Access, 2019) · cited 32× · AI/ML

**Wikidata**: [openalex:W2940802703](https://www.wikidata.org/wiki/openalex:W2940802703)  
**Source**: https://4ort.xyz/entity/dynamic-modeling-simulation-and-experimental-verification-of-a-wafer-handling-scara-robot-with-decoupling-servo-control