# Dynamic Force Characterization Microscopy Based on Integrated Nanorobotic AFM and SEM System for Detachment Process Study

> Research article (IEEE/ASME Transactions on Mechatronics, 2015) · cited 39× · AI/ML

**Wikidata**: [openalex:W1934567899](https://www.wikidata.org/wiki/openalex:W1934567899)  
**Source**: https://4ort.xyz/entity/dynamic-force-characterization-microscopy-based-on-integrated-nanorobotic-afm-and-sem-system-for-detachment-process-stud