# Double-actuator position-feedback mechanism for adjustable sensitivity in electrostatic-capacitive MEMS force sensors

> Research article (Sensors and Actuators A Physical, 2020) · cited 40× · AI/ML

**Wikidata**: [openalex:W3032095623](https://www.wikidata.org/wiki/openalex:W3032095623)  
**Source**: https://4ort.xyz/entity/double-actuator-position-feedback-mechanism-for-adjustable-sensitivity-in-electrostatic-capacitive-mems-force-sensors