# Dose regularization via filtering and projection: An open-source code for optimization-based proximity-effect-correction for nanoscale lithography

> Research article (Microelectronic Engineering, 2018) · cited 14× · AI/ML

**Wikidata**: [openalex:W2883685292](https://www.wikidata.org/wiki/openalex:W2883685292)  
**Source**: https://4ort.xyz/entity/dose-regularization-via-filtering-and-projection-an-open-source-code-for-optimization-based-proximity-effect-correction-