# Dopant, composition and carrier profiling for 3D structures

> Research article (Materials Science in Semiconductor Processing, 2016) · cited 45× · AI/ML

**Wikidata**: [openalex:W2533510459](https://www.wikidata.org/wiki/openalex:W2533510459)  
**Source**: https://4ort.xyz/entity/dopant-composition-and-carrier-profiling-for-3d-structures