# Dirichlet Process Gaussian Mixture Models for Real-Time Monitoring and Their Application to Chemical Mechanical Planarization

> Research article (IEEE Transactions on Automation Science and Engineering, 2016) · cited 27× · AI/ML

**Wikidata**: [openalex:W2514808463](https://www.wikidata.org/wiki/openalex:W2514808463)  
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