# Digital image correlation of SEM images for surface deformation of CMOS IC

> Research article (Microelectronic Engineering, 2018) · cited 11× · AI/ML

**Wikidata**: [openalex:W2896863078](https://www.wikidata.org/wiki/openalex:W2896863078)  
**Source**: https://4ort.xyz/entity/digital-image-correlation-of-sem-images-for-surface-deformation-of-cmos-ic