# Diffraction-Based Overlay Metrology With Optical Convolution Layer

> Research article (IEEE photonics journal, 2023) · cited 24× · AI/ML

**Wikidata**: [openalex:W4388838158](https://www.wikidata.org/wiki/openalex:W4388838158)  
**Source**: https://4ort.xyz/entity/diffraction-based-overlay-metrology-with-optical-convolution-layer