# Development of optical automatic positioning and wafer defect detection system

> Research article (Measurement Science and Technology, 2016) · cited 18× · AI/ML

**Wikidata**: [openalex:W2522188972](https://www.wikidata.org/wiki/openalex:W2522188972)  
**Source**: https://4ort.xyz/entity/development-of-optical-automatic-positioning-and-wafer-defect-detection-system