# Development of Machine-Learning Techniques for Time-of-Flight Secondary Ion Mass Spectrometry Spectral Analysis: Application for the Identification of Silane Coupling Agents in Multicomponent Films

> Research article (Analytical Chemistry, 2022) · cited 13× · AI/ML

**Wikidata**: [openalex:W4210501553](https://www.wikidata.org/wiki/openalex:W4210501553)  
**Source**: https://4ort.xyz/entity/development-of-machine-learning-techniques-for-time-of-flight-secondary-ion-mass-spectrometry-spectral-analysis-applicat
