# Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning

> Research article (Micromachines, 2021) · cited 20× · AI/ML

**Wikidata**: [openalex:W3151300701](https://www.wikidata.org/wiki/openalex:W3151300701)  
**Source**: https://4ort.xyz/entity/development-of-an-electrostatic-comb-driven-mems-scanning-mirror-for-two-dimensional-raster-scanning