# Development of a single-chip elasticity sensor using MEMS-based piezoresistive cantilevers with different tactile properties

> Research article (Sensors and Actuators A Physical, 2018) · cited 19× · AI/ML

**Wikidata**: [openalex:W2901770970](https://www.wikidata.org/wiki/openalex:W2901770970)  
**Source**: https://4ort.xyz/entity/development-of-a-single-chip-elasticity-sensor-using-mems-based-piezoresistive-cantilevers-with-different-tactile-proper