# Development of a Novel Pile-Up Structure Based Nanopositioning Mechanism Driven by Piezoelectric Actuator

> Research article (IEEE/ASME Transactions on Mechatronics, 2020) · cited 23× · AI/ML

**Wikidata**: [openalex:W3004498322](https://www.wikidata.org/wiki/openalex:W3004498322)  
**Source**: https://4ort.xyz/entity/development-of-a-novel-pile-up-structure-based-nanopositioning-mechanism-driven-by-piezoelectric-actuator