# Deterministic measurement and correction of the pad shape in full-aperture polishing processes

> Research article (Journal of the European Optical Society Rapid Publications, 2015) · cited 12× · AI/ML

**Wikidata**: [openalex:W2105761287](https://www.wikidata.org/wiki/openalex:W2105761287)  
**Source**: https://4ort.xyz/entity/deterministic-measurement-and-correction-of-the-pad-shape-in-full-aperture-polishing-processes