# Design, simulation, and fabrication of three-dimensional microsystem components using grayscale photolithography

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2019) · cited 34× · AI/ML

**Wikidata**: [openalex:W2990476581](https://www.wikidata.org/wiki/openalex:W2990476581)  
**Source**: https://4ort.xyz/entity/design-simulation-and-fabrication-of-three-dimensional-microsystem-components-using-grayscale-photolithography