# Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines

> Research article (IET Electric Power Applications, 2021) · cited 23× · AI/ML

**Wikidata**: [openalex:W3210995614](https://www.wikidata.org/wiki/openalex:W3210995614)  
**Source**: https://4ort.xyz/entity/design-parameters-of-a-reluctance-actuation-system-for-stable-operation-conditions-with-applications-of-highprecision-mo
