# Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control

> Research article (Computers & Chemical Engineering, 2017) · cited 12× · AI/ML

**Wikidata**: [openalex:W2587258713](https://www.wikidata.org/wiki/openalex:W2587258713)  
**Source**: https://4ort.xyz/entity/design-of-optical-emission-spectroscopy-based-plasma-parameter-controller-for-real-time-advanced-equipment-control
