# Design of a XYZ scanner for home-made high-speed atomic force microscopy

> Research article (Microsystem Technologies, 2017) · cited 22× · AI/ML

**Wikidata**: [openalex:W2770601958](https://www.wikidata.org/wiki/openalex:W2770601958)  
**Source**: https://4ort.xyz/entity/design-of-a-xyz-scanner-for-home-made-high-speed-atomic-force-microscopy