# Design of a Capacitive MEMS Accelerometer with Softened Beams

> Research article (Micromachines, 2022) · cited 25× · AI/ML

**Wikidata**: [openalex:W4221085339](https://www.wikidata.org/wiki/openalex:W4221085339)  
**Source**: https://4ort.xyz/entity/design-of-a-capacitive-mems-accelerometer-with-softened-beams