# Design and optimization of an integrated MEMS gas chamber with high transmissivity

> Research article (Digital Communications and Networks, 2020) · cited 20× · AI/ML

**Wikidata**: [openalex:W3041339152](https://www.wikidata.org/wiki/openalex:W3041339152)  
**Source**: https://4ort.xyz/entity/design-and-optimization-of-an-integrated-mems-gas-chamber-with-high-transmissivity