# Design and FEM simulation for a novel resonant silicon MEMS gyroscope with temperature compensation function

> Research article (Microsystem Technologies, 2017) · cited 14× · AI/ML

**Wikidata**: [openalex:W2742339507](https://www.wikidata.org/wiki/openalex:W2742339507)  
**Source**: https://4ort.xyz/entity/design-and-fem-simulation-for-a-novel-resonant-silicon-mems-gyroscope-with-temperature-compensation-function
