# Design and analysis of new ultra compact decoupled XYZ<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline" id="d1e965" altimg="si25.svg"><mml:mi>θ</mml:mi></mml:math> stage to achieve large-scale high precision motion

> Research article (Mechanism and Machine Theory, 2021) · cited 26× · AI/ML

**Wikidata**: [openalex:W3204696603](https://www.wikidata.org/wiki/openalex:W3204696603)  
**Source**: https://4ort.xyz/entity/design-and-analysis-of-new-ultra-compact-decoupled-xyz-mml-math-xmlns-mml-http-www-w3-org-1998-math-mathml-display-inlin